applications
The equipment will apply mainly to polysilicon melt purification and directional solidification.
characteristic structure
The device has two parts.The up side of the furnace is melt purification part ,the lower part is insulation directional solidification part .Between them is a groove.We adopt high frequency induction to melt and graphite resistance to keep warm.The vacuum system is made up of oil diffusion pump,roots pump,mechanical pump.Both of the two parts can use the vacuum system at the same time.
technical parameter
1.rated power100KW
2.rated temperature1600℃
3.crucible size3KG
4.Speed of directional solidification
5-25mm/h
5.Ultimate vacuum of cold
6.67กม10-3Pa |
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